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Energy-dispersive X-ray spectroscopy

Energy-dispersive X-ray spectroscopy (EDS, also abbreviated EDX or XEDS) is an analytical technique that enables the chemical characterization/elemental analysis of materials. A sample excited by an energy source (such as the electron beam of an electron microscope) dissipates some of the absorbed energy by ejecting a core-shell electron. A higher energy outer-shell electron then proceeds to fill its place, releasing the difference in energy as an X-ray that has a characteristic spectrum based on its atom of origin. This allows for the compositional analysis of a given sample volume that has been excited by the energy source. The position of the peaks in the spectrum identifies the element, whereas the intensity of the signal corresponds to the concentration of the element.

EDS elemental mapping

As previously stated, an electron beam provides sufficient energy to eject core-shell electrons and cause X-ray emission. Compositional information, down to the atomic level, can be obtained with the addition of an EDS detector to an electron microscope. As the electron probe is scanned across the sample, characteristic X-rays are emitted and measured; each recorded EDS spectrum is mapped to a specific position on the sample. The quality of the results depends on the signal strength and the cleanliness of the spectrum. Signal strength relies heavily on a good signal-to-noise ratio, particularly for trace element detection and dose minimization (which allows for faster recording and artifact-free results). Cleanliness will impact the number of spurious peaks seen; this is a consequence of the materials that make up the electron column.

EDS materials analysis

  • Sensitive to low concentrations—minimum detection limits below 0.1% in the best cases
  • Affords a high degree of relative precision—typically 2–4%
  • Non-destructive in most situations
  • Usually requires minimal sample preparation effort and time
  • Delivers complete analyses of complex samples quickly, often in under a minute

Advanced and fully integrated EDS solutions are available on Thermo Scientific TEM, SEM and Desktop systems.

Elemental mapping software


Resources

Segmented surface rendering of nanoparticles colored with elements present: silver cores (red) with platinum shells (green). To increase visibility, the platinum shells have been colored semitransparent. Sample Courtesy of Prof. Yi Ding and Prof. Jun Luo, Center for Electron Microscopy, Tianjin University of Technology.

EDS tomography of P-Zn-In nanotubes. Sample courtesy of Dr. Reza Shahbazian Yassar, Michigan Tech University.

Segmented surface rendering of nanoparticles colored with elements present: silver cores (red) with platinum shells (green). To increase visibility, the platinum shells have been colored semitransparent. Sample Courtesy of Prof. Yi Ding and Prof. Jun Luo, Center for Electron Microscopy, Tianjin University of Technology.

EDS tomography of P-Zn-In nanotubes. Sample courtesy of Dr. Reza Shahbazian Yassar, Michigan Tech University.

Applications

Grano mineral de aluminio encontrado con SEM durante las pruebas de limpieza de piezas

Limpieza técnica

Más que nunca, la fabricación moderna necesita componentes fiables y de calidad. Con la microscopía electrónica de barrido, el análisis de limpieza de las piezas se puede llevar a cabo internamente, lo que le proporciona una amplia gama de datos analíticos y acorta su ciclo de producción.

Control de calidad y análisis de fallos mediante microscopía electrónica

Control de calidad y análisis de fallos

El control y garantía de calidad son esenciales en la industria moderna. Ofrecemos una gama de herramientas de EM y espectroscopía para el análisis multiescala y multimodal de defectos, lo que le permite tomar decisiones fiables e informadas para el control y la mejora de procesos.

Fundamental Materials Research_R&D_Thumb_274x180_144DPI

Investigación sobre materiales fundamentales

Se investigan nuevos materiales a escalas cada vez más pequeñas para lograr el máximo control de sus propiedades físicas y químicas. La microscopía electrónica proporciona a los investigadores información clave sobre una amplia variedad de características materiales a escala nanométrica.

 


Samples


Investigación de baterías

El desarrollo de baterías se realiza mediante análisis multiescala con microCT, SEM y TEM, espectroscopía Raman, XPS y visualización y análisis 3D digital. Aprenda cómo este enfoque proporciona la información estructural y química necesaria para crear mejores baterías.

Más información ›


Investigación sobre polímeros

La microestructura polimérica determina las características y el rendimiento del material a granel. La microscopía electrónica permite un análisis exhaustivo en microescala de la morfología y composición de los polímeros para aplicaciones de control de calidad e I+D.

Más información ›


Investigación sobre metales

La producción eficaz de metales requiere un control preciso de las inclusiones y precipitados. Nuestras herramientas automatizadas pueden realizar varias tareas cruciales para el análisis de metales, incluyendo el recuento de nanopartículas, el análisis químico EDS y la preparación de muestras de TEM.

Más información ›


Gas y petróleo

A medida que la demanda de petróleo y gas continúa, existe la necesidad constante de una extracción eficiente y eficaz de hidrocarburos. Thermo Fisher Scientific ofrece una amplia gama de soluciones de microscopía y espectroscopía para una gran variedad de aplicaciones de la ciencia del petróleo.

Más información ›


Nanopartículas

Los materiales tienen propiedades sustancialmente diferentes en la nanoescala y en la macroescala. Para estudiarlos, la instrumentación S/TEM se puede combinar con la espectroscopia de rayos X por dispersión de energía para obtener datos de resolución nanométrica, o incluso subnanométrica.

Más información ›


Investigación geológica

Las ciencias geológicas están basadas en la observación uniforme y precisa de múltiples escalas de características dentro de las muestras de roca. SEM-EDS, combinado con software de automatización, permite el análisis directo a gran escala de la composición de la textura y los minerales para la investigación de la petrología y la mineralogía.

Más información ›


Estudios forenses

Los microrastros de las pruebas de las escenas del crimen se pueden analizar y comparar usando microscopía electrónica como parte de una investigación forense. Las muestras compatibles incluyen fragmentos de vidrio y pintura, marcas de herramientas, drogas, explosivos y residuos de armas de fuego.

Más información ›


Materiales 2D

La investigación de materiales novedosos presta cada vez más atención a la estructura de materiales de baja dimensión. La microscopía electrónica de transmisión de barrido con corrección de sonda y monocromación permite la adquisición de imágenes de materiales bidimensionales de alta resolución.

Más información ›


Investigación sobre catálisis

Los catalizadores son cruciales para la mayoría de los procesos industriales modernos. Su eficacia depende de la composición microscópica y la morfología de las partículas catalíticas; EM con EDS es ideal para estudiar estas propiedades.

Más información ›


Pruebas de materiales para automóviles

Todos los componentes de un vehículo moderno están diseñados para garantizar la máxima seguridad, eficacia y rendimiento. La caracterización detallada de materiales de automoción con microscopía electrónica y espectroscopía informa sobre decisiones cruciales sobre procesos, mejoras de productos y nuevos materiales.

Más información ›


Products

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Apreo ChemiSEM System

  • Integrated SEM imaging and chemical characterization
  • Enhanced automation to simplify workflows
  • Extended source lifetime and schedulable upgrades

Iliad (S)TEM

  • Advanced integration of EELS and SEM optics
  • Electrostatic beam blanker
  • High energy resolution electron source

Spectra Ultra

  • New imaging and spectroscopy capabilities on the most beam sensitive materials
  • A leap forward in EDX detection with Ultra-X
  • Column designed to maintain sample integrity.

Spectra 200

  • High-resolution and contrast imaging for accelerating voltages from 30-200 kV
  • Symmetric S-TWIN/X-TWIN objective lens with wide-gap pole piece design of 5.4 mm
  • Sub-Angstrom STEM imaging resolution from 60 kV-200 kV

Spectra 300

  • Highest-resolution structural and chemical information at the atomic level
  • Flexible high-tension range from 30-300 kV
  • Three lens condenser system
Thermo Scientific Talos L120C transmission electron microscope (TEM)

Talos L120C TEM

  • High versatility and stability
  • 4k x 4k Ceta CMOS camera for speed and large FOV
  • TEM magnification range of 25X to 650kX
  • EDS and STEM options for compositional analyses

Talos F200i TEM

  • Compact design with X-TWIN objective lens
  • Available with S-FEG, X-FEG, and X-CFEG
  • Flexible and fast EDS options for comprehensive elemental analysis

Talos F200X TEM

  • High-resolution, EDS cleanliness, and quality in 2D as well as 3D
  • X-FEG and X-CFEG available for the highest brightness and energy resolution
  • High accuracy and repeatable results with integrated Thermo Scientific Velox Software
Thermo Scientific Talos F200C transmission electron microscope (TEM)

Talos F200C TEM

  • High-contrast and high-quality TEM and STEM imaging
  • 4k x 4k Ceta CMOS camera options for large FOV and high read-out speeds
  • Large pole piece gap and multiple in situ options

Talos F200S TEM

  • Intuitive and easy-to-use automation software
  • Available with Super-X EDS for rapid quantitative chemical analysis
  • High-throughput with simultaneous multi-signal acquisition
Thermo Scientific Helios Hydra plasma focused ion beam scanning electron microscope (DualBeam)

Helios Hydra DualBeam

  • 4 fast switchable ion species (Xe, Ar, O, N) for optimized PFIB processing of a widest range of materials
  • Ga-free TEM sample preparation
  • Extreme high resolution SEM imaging

Helios 5 PFIB DualBeam

  • Gallium-free STEM and TEM sample preparation
  • Multi-modal subsurface and 3D information
  • Next-generation 2.5 μA xenon plasma FIB column

Helios 5 HX/Helios 5 UX/Helios 5 FX DualBeam

  • Fully automated, high-quality, ultra-thin TEM sample preparation
  • High throughput, high resolution subsurface and 3D characterization
  • Rapid nanoprototyping capabilities
Thermo Scientific Verios 5 XHR scanning electron microscope (SEM)

Verios 5 XHR SEM

  • Monochromated SEM for sub-nanometer resolution over the full 1 keV to 30 keV energy range
  • Easy access to beam landing energies as low as 20 eV
  • Excellent stability with piezo stage as standard
Thermo Scientific Quattro E scanning electron microscope (SEM)

Quattro ESEM

  • Ultra-versatile high-resolution FEG SEM with unique environmental capability (ESEM)
  • Observe all information from all samples with simultaneous SE and BSE imaging in every mode of operation
Thermo Scientific Prisma E scanning electron microscope (SEM)

Prisma E SEM

  • Entry-level SEM with excellent image quality
  • Easy and quick sample loading and navigation for multiple samples
  • Compatible with a wide range of materials thanks to dedicated vacuum modes

VolumeScope 2 SEM

  • Isotropic 3D data from large volumes
  • High contrast and resolution in high and low vacuum modes
  • Simple switch between normal SEM use and serial block-face imaging
Thermo Scientific Apreo 2 scanning electron microscope (SEM)

Apreo 2 SEM

  • High-performance SEM for all-round nanometer or sub-nanometer resolution
  • In-column T1 backscatter detector for sensitive, TV-rate materials contrast
  • Excellent performance at long working distance (10 mm)
Thermo Scientific Scios 2 plasma focused ion beam scanning electron microscope (DualBeam)

Scios 2 DualBeam

  • Full support of magnetic and non-conductive samples
  • High throughput subsurface and 3D characterization
  • Advanced ease of use and automation capabilities

Phenom XL G2 Desktop SEM

  • For large samples (100x100 mm) and ideal for automation
  • <10 nm resolution and up to 200,000x magnification; 4.8 kV up to 20 kV acceleration voltage
  • Optional fully integrated EDS and BSE detector

Phenom ProX G6 Desktop SEM

  • High performance desktop SEM with integrated EDS detector
  • Resolution <6 nm (SE) and <8 nm (BSE); magnification up to 350,000x
  • Optional SE detector

Phenom Pro G6 Desktop SEM

  • High performance desktop SEM
  • Resolution <6 nm (SE) and <8 nm (BSE); magnification up to 350,000x
  • Optional SE detector

Phenom ParticleX AM Desktop SEM

  • Versatile desktop SEM with automation software for Additive Manufacturing
  • Resolution <10 nm; magnification up to 200,000x
  • Optional SE detector

Phenom ParticleX TC Desktop SEM

  • Versatile desktop SEM with automation software for Technical Cleanliness
  • Resolution <10 nm; magnification up to 200,000x
  • Optional SE detector

Phenom Pure G6 Desktop SEM

  • Entry level desktop SEM
  • Resolution <15 nm; magnification up to 175,000x
  • Longlife CeB6 source

Phenom Perception GSR Desktop SEM

  • Dedicated automated GSR desktop SEM
  • Resolution <10 nm; magnification up to 200,000x
  • Longlife CeB6 source

Phenom Pharos G2 Desktop FEG-SEM

  • FEG source with 1 – 20 kV acceleration voltage range
  • <2.0 nm (SE) and 3.0 nm (BSE) resolution @ 20 kV
  • Optional fully integrated EDS and SE detector

Avizo Software
Materials Science

  • Support for multi-data/multi-view, multi-channel, time series, very large data
  • Advanced multi-mode 2D/3D automatic registration
  • Artifact reduction algorithms
Thermo Scientific Inspect 3D tomography software

Inspect 3D Software

  • Image processing tools and filters for cross-correlation
  • Feature tracking for image alignment
  • Algebraic reconstruction technique for iterative projection comparison
Thermo Scientific Maps electron microscopy software

Maps Software

  • Acquire high-resolution images over large areas
  • Easily find regions of interest
  • Automate image acquisition process
  • Correlate data from different sources

Elemental Mapping

  • Fast and reliable information on the distribution of elements within the sample or the selected line
  • Easily exported and reported results

3D Reconstruction

  • Intuitive user interface, maximum employability
  • Intuitive fully automated user interface
  • Based on 'shape from shading' technology, no stage tilt required

Velox

  • An experiments panel on the left side of the processing window.
  • Live quantitative mapping
  • Interactive detector layout interface for reproducible experiment control and setup
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